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Precision XY Measuring Stage with Nanometer Resolution for Industrial Applications
The new MCS XY stage from PI miCos for industrial measurement technology combines high guiding and positioning accuracy with loads of up to 20 kg and high dynamics.
Its areas of applications include industrial surface measurement technologies such as topology measurements on workpieces and optics or structural measurements on semiconductor wafers. Its high load capacity of 20 kg allows further axes to be mounted on the platform, such as vertical, rotary or tilting stages.
The MCS system achieves its performance characteristics through selective combination of mechanical and electronic precision components. With an optionally available linear encoder based on an interferometric displacement measuring system, the MCS achieves a resolution of 5 nanometers at a repeatability of 0.2 µm and a positioning accuracy of 3 µm over the entire travel range of 102 mm per axis.
Its low straightness and flatness deviations in the XY motion plane of less than 2 µm confirm the high precision of the system.
The MSC is driven by DC motors, stepper motors or magnetic linear motors, as desired. In the system equipped with the SMC Hydra Motion Controller from PI miCos, the XY stage achieves velocities of up to 200 mm/s and is also capable of moving constantly at a velocity below 1 µm/s.
About PI and PI miCos
PI miCos GmbH was founded in Eschbach near Freiburg, Germany, in 1990 and is now part of PI (Physik Instrumente). Already well-known and respected for their high-quality products, PI is one of the leading players in the international market for precision positioning technology in the fields of photonics, nanotechnology, semiconductor and life sciences. The company has been developing and manufacturing standard and OEM products with Piezo or motor drives for over 40 years. With headquarters in Karlsruhe, Germany, four factories and ten subsidiaries employing more than 700 people globally, the PI group has a presence in every major market worldwide. The company has been ISO 9001 certified since 1994.